MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(1x10^-9 to 5x10^-2 Torr) Modular Vacuum Gauge

The MKS, Granville-Phillips® 354 Micro-Ion® Vacuum Gauge Module combines the world's smallest ionization vacuum gauge with the control electronics to create a compact, convenient, reliable, and cost-saving solution for many high vacuum applications. The 354 Micro-Ion® Vacuum Gauge Module includes many features that provide for more accurate and repeatable measurement than traditional Bayard-Alpert gauges from 5 x 10^-2 Torr to 10^-9 Torr. The 354 Micro-Ion® Vacuum Gauge Module all-metal package provides a rugged enclosure and a high level of immunity to electrical noise. High performance in a small volume is achieved though a number of enhancements including a patented dual ion collector design that optimizes electron motion and ion collection.

354 Micro-Ion® Vacuum Gauge Modules are available with analog output, RS-485 or DeviceNet™ interfaces. The analog output and DeviceNet versions have a digital display option for convenient, point-of-use pressure readout.

FEATURES & BENEFITS:

• Compact, convenient, reliable, cost-saving vacuum measurement
• Vacuum pressure measurement to 10^-9 Torr (10^-9 mbar, 10^-7 Pa)
• Dual filaments increase equipment uptime
• Ultra-clean construction allows rapid response during pump down
• Rugged, all-metal, RF and noise-immune module is CE compliant
• Optional local display aids in setup and diagnostics
• RS-485 and DeviceNet™ digital interfaces available
• Increased long-term stability over traditional designs

APPLICATIONS:

354 Micro-Ion® Vacuum Gauge Modules are a convenient and reliable solution for applications that do not need front panel displays and controls.