GA,RPL MICRO-ION ATM Y NW25KF_1226304
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GA,RPL MICRO-ION ATM Y NW25KF

Communicationn/a
DescriptionReplacement Gauge
Displayn/a
FittingNW25KF
Relays-
Unitsn/a
MKS Vacuum Gauge, Controller, & Module product overview
390 Micro-Ion® ATM Module data sheet
390 Micro-Ion® ATM Module Instruction Manual 390412-#-##-# manual (390007)
Declaration of Conformity: 390 & 392 Micro-Ion® ATM and PR Diaphragm Module (017483)
390 Micro-Ion Gauge, 390531 Series w/ Filament Status Output manual (170196)
390 Micro-Ion® ATM Gauge Removal and Replacement proceedure (390400)
390 Micro-Ion® ATM Four-Sensor Combination Vacuum Gauge with RS-485 Interface and Analog Output manual (390001)
Overview

MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(1x10-9 Torr to Atmosphere) Modular Vacuum Gauge

The MKS, Granville-Phillips® 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

The 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module's full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet™ digital interfaces. RS-485 and DeviceNet™ versions have up to three optional setpoint relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

FEATURES & BENEFITS:

  • Continuous pressure measurement from high vacuum to atmosphere
  • Dual ionization gauge filaments increase equipment uptime
  • Optional setpoint relays for process control
  • Analog, RS-485, or DeviceNet output available
  • Optional graphics LCD display

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