MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(0.1 to 1000 Torr)

Pressure/vacuum gauges with MEMS-based Piezo sensors

The MKS 902B Piezo transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type.

FEATURES & BENEFITS:

• Low cost transducer alternative to more expensive conventional transducers
• Gas independent pressure measurement for accurate, total pressure measurement
• Sensor is suitable for harsh processes due to robust design and stainless steel construction
• Solid state Piezo sensor resistant to damage from air inrush and vibrations
• Compact system design with integrated electronics and sensor in one unit
• Mountable in any orientation for ease of installation
• Reduced process cycle time due to sensor’s fast, accurate and repeatable pressure measurements
• Ease of operation with both analog output and digital communication
• Multiple analog output emulations available
• Process control with up to three setpoint relays with fast response time
• Optional display version

APPLICATIONS:

With a measurement range of 0.1 to 1000 Torr full scale, the 902B sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace.

VCR® is a registered trademark of Swagelok® Company.