MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.
(1.0x10-5 Torr to Atmosphere)
Pressure/vacuum gauges with MEMS-based Micro Pirani™ vacuum sensors
The 925 Micro Pirani™ vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 Micro Pirani™ offers analog voltage output, digital interface and set point relays for process controlling.
FEATURES & BENEFITS:
- Increased measurement range from 10-5 Torr to Atmosphere, two decades beyond a standard Pirani
- Analog output and digital communication
- Mountable in any orientation
- Three optional set point relays for process control
- Optional local display
APPLICATIONS:
The 925 Micro Pirani™ vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:
- General vacuum pressure measurement
- Foreline and roughing pressure measurement
- Gas backfilling measurement and control
- Mass spectrometer control
- Activation of UHV gauges
- System process control (interlocks, valves, pumps)
- Control system pressure
The 925 Micro Pirani™ vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software. Contact MKS Customer Service for details and assistance.
VCR® compatible parts may be used.
VCR® is a registered trademark of Swagelok® Company.