MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.
(1x10-8 Torr to Atmosphere)
Cold cathode inverted magnetron and MicroPirani™ pressure/vacuum gauge
The 972B DualMag™ vacuum transducer combines cold cathode inverted magnetron and MicroPirani™ thermal conductivity MEMS vacuum sensor technologies. The MicroPirani™ offers 1-2 decades lower measuring range than a traditional Pirani gauge for lower control pressures.
FEATURES & BENEFITS:
- Small footprint design provides a compact vacuum gauge solution that saves tool space
- User serviceable to decrease downtime
- Both analog and digital communication
- Low cost multi-sensor design
- Optional local display
APPLICATIONS:
- Analytical equipment (mass spectrometer control)
- Scanning electron microscopes
- Coating systems
- General vacuum base pressure measurement