MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(1x10-8 to 1500 Torr)

Cold Cathode, MicroPirani™, & Piezo pressure/vacuum gauges

The 974B QuadMag™ vacuum transducer combines cold cathode inverted magnetron, MicroPirani™ and Piezo differential vacuum sensor technologies. In addition to its small size, broad range and lower cost, the 974B can be operated via digital communication or as an autonomous analog unit.

FEATURES & BENEFITS:

• Small footprint design provides a compact vacuum gauge solution that saves tool space
• User serviceable to decrease downtime
• Both analog and digital communication
• Low cost multi-sensor design
• Optional local display

APPLICATIONS:

The 974 has been specifically designed for pressure measurement within a vacuum load lock. It has the capability to replace multiple pressure measurement devices on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities.

• Analytical equipment (mass spectrometer control)
• Scanning electron microscopes
• Coating systems
• Semiconductor loadlock pressure control
• General vacuum base pressure measurement