FLOW TRANSDUCER HE 500 SCCM_1130190
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FLOW TRANSDUCER HE 500 SCCM

Accuracy±1% full-scale
CertifiedYes
DescriptionMass flow controller, universal COMM, for He, 0 to 500 sccm
Fluid TypeViscous
Max Operating Temperature (DegreeC)50
Max Operating Temperature (DegreeF)122
Output0 to 5 VDC (2000 Ω minimum load)
Output (Voltage)Yes
Pressure drop at maximum flow (PSID)0.5
Repeatability±0.2% full-scale
View Virtual Catalog - English - gy44-0375.pdf
Overview
  • All models include a calibration certificate to NIST-traceable standards. Flow rates are unaffected by modest temperature and pressure variations—providing excellent response and accuracy Nonclogging straight-tube sensor ensures laminar gas flow for more accurate measurements
  • All models include a calibration certificate to NIST-traceable standards.
  • Flow rates are unaffected by modest temperature and pressure variationsproviding excellent response and accuracy
  • Nonclogging straight-tube sensor ensures laminar gas flow for more accurate measurements

This flow controller may be paired with an existing control system, but has been designed to be used with the Mass Flow Command Modules in Series 32681-XX.

This controller element includes both a flowmeter element and electromagnetically actuated control valve. The flowmeter design features an advanced straight-tube thermal dispersion sensor that ensures accurate and repeatable results. Gas flow measurements are unaffected by moderate temperature and pressure variations at the inlet.

The meter allows for a four-point calibration across the flow range to improve meter linearity. An NIST-traceable calibration certificate is included for each controller unit.

Each controller is factory calibrated for use with a specific gas. One key benefit of this design is its strong repeatability characteristics, making it ideal for use in applications where the variability of multiple controllers can affect the quality of a process.

Controller is easily connected to the command module using an 8-ft long flat cable with integrated multipin D-sub connector (included). To protect from wiring errors, each controller is protected from shorting or polarity reversal by a resettable fuse.

Wetted parts for the controller are 316 SS and Viton® O-rings. Buna-N, Kalrez® or Neoprene O-rings are available upon request.

These controllers operate and maintain the stated full-scale accuracy and linearity at inlet pressures between 10 and 60 psi (0.68 to 4.10 bars) and gas temperatures between 59 and 77°>F (15 to 25°>C). If operating outside 10 to 60 psi, add ±0.01%/psi full-scale (±0.145fi/bar); if operating outside 59 to 77°>F, add ±0.08%/°>F full-scale (±0.15%/°>C).

KARLEZ, VITON—Reg TM DuPont Dow Elastometers L.L.C.

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