MultiTherm™ temperature controllers provide all the necessary means for highly uniform temperature control across multiple zones and excellent uniformity of heat distribution across combined area while preserving system costs and real estate. MultiTherm™ temperature controllers can be seamlessly interfaced to a control system via standard fieldbus protocols, and can also function as a stand-alone controller, with the ability to interface with the MKS Controls Workbench application or Labview.

Precise & stable temperature control with fast acting interference handling

• High Accuracy, high stability sensing supporting TC's and RTD's
• Fast acting, dynamic outputs using phase-fire and zero crossing methods.
• Independent PID loops or coordinated loops using Model Based Control (MBC)

Secure of control algorithms

• Supports custom control algorithms without disclosure of source code (IP)

Easy to design in & easy to maintain

• Fieldbus connectivity, Web-server
• Hardware & Software-based Safety Interlocks, custom power distribution with protection and heater health monitoring
• Field upgradable and serviceable

MultiTherm™ 2000 Modular Temperature Controller provides a modular architecture (based on the MKS Automation Platform) for temperature control that can be easily configured for single zone or multi-zone temperature control applications. MultiTherm™ 2000 Controller can be used as a standalone temperature controller or it can be easily integrated with a PLC or control system, with support for standard fieldbus and control networks, such as EtherCAT™ or Modbus TCP/IP.

FEATURES & BENEFITS:

• Modular architecture - improved flexibility, serviceability, and scalability.
• Capable of standalone control or can be integrated with a PLC or control network.
• Integrates with a wide variety of heaters, SSR's, and inputs or outputs.
• Supports standard fieldbuses & control networks such as EtherCAT & Modbus TCP/IP
• Incorporates Current Transformer (CT) inputs for heater diagnostics
• Advanced control capabilities & programmability via:
  • Support for Model Based Control (MBC) or standard PID control
  • Advanced autotuning algorithm for specific application requirements
  • Cascading loops for applications requiring extremely fast recovery from disturbances.
  • PID gain scheduling for strict process requirements over a broad range of temperatures.
  • Option for full programmability via IEC61131-3 programming environment
• Can function as a standalone controller, with interface options for Labview.
• "Off-the-shelf" availability for faster time to market
• EtherCAT™ connectivity enables temperature control integration into fast and highly repeatable (down to tens of µsecs) control networks enabling both rapid and highly stable temperature control.
• Quiet, compact, din rail mount enclosure does not require active cooling.

APPLICATIONS:

• Semiconductors, Solar, and LED/MOCVD manufacturing tools
• Furnaces and environmental chambers requiring multi-zone control
• Plastic injection molding and extrusion systems
• Medical, BioPharm, & Life Sciences
• Packaging, food & beverage processes
• Environmental & Continuous Emissions Monitoring (CEMs)