High Vacuum Pumps

Leybold offers a broad range of different high and ultra high vacuum pumps. These pumps vary in the principle of operation and field of application: turbomolecular vacuum pumps of the TURBOVAC and MAG series, diffusion vacuum pumps DIP and cryo vacuum pumps of the COOLVAC series. Important items for the selection of the adequate high vacuum pump are: attainable ultimate pressure, required pumping speed, gas throughput or compression.

DIJ

Oil Diffusion Pumps

Oil diffusion pumps from Leybold are ideally suited for industrial high vacuum applications. They excel with superior vacuum performance and are reliable components in medium vacuum and high vacuum systems with a fit and form retrofit capability.

DIJ 630

DIJ benefits at a glance

■ Most innovative heating concept utilizing newly developed heater cartridges with large heat exchange surface for an optimized energy transfer into the oil. Effective temperature monitoring protects the system against overheating. The insulated heater area ensures minimum energy losses.

+ Minimum stress and longest lifetime for heaters and oil
+ Highest uptime
+ Flanged heaters, easy to exchange

■ Choice of flange variants for improved connectivity
+ ANSI / Inch flanges (with O-ring)
+ ISO-F or ISO-K flanges (with centering ring)

■ Unique baffle design + Proven cold cap baffle at the inlet to minimize oil backstreaming
+ Innovative, new foreline baffle for reduced oil losses

■ Various electrical connection opportunities to meet customers requirements
+ Basic – simplified OEM connection with male plug
+ Standard – with circuit breaker box
+ ECO, with switchbox and energy control unit

■ Five stage system design provides excellent performance data
+ Four diffusion pump stages for highest suction speed at low pressures and lowest final pressure
+ One ejector stage for high forevacuum stability and stable throughput at pressures >10^-3 mbar

Typical Applications

• Vacuum coating
• Metallurgy
• Vacuum furnaces
• Vacuum drying
• Research and development

DIJ Oil Diffusion Pump Advantages

Prolonged maintenance intervals, non-wearing, high safety standard.

• High and stable throughput at pressures >10^-3 mbar
• High forevacuum tolerance
• High pumping speed
• Safe and economical
• CE compliant electronics supplied
• No wear caused by moving parts
• Simple to operate
• Maintenance friendly design for rapid and simple replacement of heating elements
• Wide range of accessories available
• Innovative ECO Energy control unit (ROI)

Power Efficiency Control -

Energy savings up to 30% without power loss

Oil diffusion pumps require a certain minimum oil temperature for operation. Commonly, 100% of the installed heating power is constantly utilized. The innovative Leybold power efficiency control unit for diffusion pumps cuts power consumption by up to 30% since the supplied power is significantly reduced after the pump has attained its operating temperature. Further savings result from the utilization of the standby mode at a reduced temperature.

• Cost reductions through energy-savings (up to 30%)
• Increased service life of oil and heating cartridges
• Excellent operating convenience and simple use
• Fast ROI (< 2 years)
• Simple, visual monitoring of the parameters
• PLC driven
• USB Interface and Ethernet