Valves
Vacuum technology puts great demands on the functioning and reliability of the valves. The demands are fulfilled only if correct shut-off devices are installed for each application, depending on the method of construction, method of operation, and size. Moreover, in the construction and operation of vacuum plants, factors such as the flow conductance and leak-tightness of valves are of great importance. The valves of Leybold are optimized with regard to these demands. For every flange system there are a lot of valve types available.
Special Valves and SECUVAC Valves
UHV All-metal valve
Our UHV all metal angle valves are the reliable solution for all applications in ultra-high vacuum. The innovative design and rotatable CF flanges allow a convenient handling and an easy installation.
The reliability of the valve is achieved by the use of optimal sealing materials. The silver-coated sealing with its very long service life is maintenance-free at more than 1000 cycles. A mechanical stop prevents the valve from too much torque that might cause damages to the sealing. Also the mechanical stop indicates when the valve is fully closed. For operating the valve a plastic hand wheel and a metal T-handle are available. The advantage of the T-handle is that it suited for heating processes and does not need to be removed.
Advantages to the User
- Very reliable sealing
- Maintenance-free for over 1000 cycles
- Very easy to use, mechanical stop prevents from over torque
- T-handle available for bake out processes
- Coated spindle, no lubrication necessary
- Very high lifetime due to the coated metal sealing
| UHV-All-Metal Right-Angle Valves - with Rotatable Flanges on Both Sides | ||||
|---|---|---|---|---|
| DN | CF | 16 | 40 | 63 |
| Connection flange, rotatable | DN | 16 CF-R | 40 CF-R | 63 CF-R |
| Leak rate: body, valve seat | mbar x l/s | < 1 x 10-10 | ||
| Differential pressure on the plate in either direction | bar | 2 | ||
| Differential pressure at opening | bar | 1 | ||
| Closing force | closing to a mechanical stop | |||
| Turns per stroke | 6 | 11 | 9 | |
| Valve position indication | visual (mechanical) | |||
| Service life | cycles | 1,000 | ||
| Conductance for molecular flow | l/s | 5 | 50 | 105 |
| Pressure, absolute min. max. |
mbar bar |
1 x 10-11 2 |
||
| Mounting orientation | any | |||
| Bake out temperature | °C | ≤ 300 | ||
| Max. heating and cooling rate | °C/h | ≤ 60 | ||
| Bellows | Material | Stainless steel 1.4404 | ||
| Valve disk | Material | Stainless steel 1.4404, 1.4435 | ||
| Valve disk seal | Material | Metal | ||
| Weight | kg | 0.4 | 1.9 | 5.9 |
