High Vacuum Pumps

Leybold offers a broad range of different high and ultra high vacuum pumps. These pumps vary in the principle of operation and field of application: turbomolecular vacuum pumps of the TURBOVAC and MAG series, diffusion vacuum pumps DIP and cryo vacuum pumps of the COOLVAC series. Important items for the selection of the adequate high vacuum pump are: attainable ultimate pressure, required pumping speed, gas throughput or compression.

TURBOVAC / TURBOVAC MAG

Turbomolecular Pumps

Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains “classic” turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used.

TURBOVAC MAGiNTEGRA

Magnetic Rotor Suspension / Integrated Frequency Converter

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller and interconnecting cables are no longer necessary..